Zirconium Nitride (ZrN) Sputtering Targets

Zirconium nitride (ZrN) is an inorganic compound used in various ways due to its properties. ZrN grown by physical vapor deposition (PVD) is a light gold color similar to elemental gold. ZrN has a room-temperature electrical resistivity of 12.0 µΩ·cm and a temperature coefficient of resistivity of 5.6·10−8 Ω·cm/K. It has a superconducting transition temperature of 10.4K and a relaxed lattice parameter of 0.4575 nm. The hardness of single-crystal ZrN is 22.7±1.7 GPa, and the elastic modulus is 450 GPa. Zirconium nitride is a hard ceramic material similar to titanium nitride and is a cement-like refractory material.
Our Zirconium nitride (ZrN) sputtering target are available in a variety of sizes and shape in planar or cycle.