Silicon Nitride (Si3N4) Sputtering Target

Silicon nitride is a chemical compound of the elements silicon and nitrogen, with the formula Si3N4. It is a white, high-melting-point solid that is relatively chemically inert, being attacked by dilute HF and hot H2SO4. It is tough (8.5 on the Mohs scale). It is the most thermodynamically stable of silicon nitrides.
Our Silicon Nitride (Si3N4) sputtering target are available in a variety of sizes and shape in planar or cycle.