Tantalum Oxide (Ta2O5) Sputtering Targets

Tantalum oxide is an inorganic chemical compound with a chemical formula of Ta2O5. It is crystalline solid and white in appearance with a density of 8.2 g/cc, a melting point of 1,872°C, and a vapor pressure of 10-4 Torr at 1,920°C. It is mainly used to produce capacitors which can be found in auto electronics, cell phones, and tools. Tantalum oxide can also be found in the glass for camera lenses. It is evaporated under vacuum to form films for the fabrication of semiconductors, optoelectronic devices, and fuel cells.
Our Tantalum oxide sputtering target are available in a variety of sizes and shape in planar or cycle.